Onto Innovation
16 Jonspin Road, Wilmington, MA, 01887, United States
Overview
Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that include: Un-patterned wafer quality; 3D metrology spanning chip features from nanometer-scale transistors to large die interconnects; macro defect inspection of wafers and packages; metal interconnect composition; factory analytics; and lithography for advanced semiconductor packaging. The breadth of this portfolio allows us to collaborate with customers about their process yields and process variations from bare silicon wafers through the wafer fab to the final back-end packaging. Onto Innovation’s software brings an understanding of how individual processes affect the overall product, enabling customers to improve product quality and reliability.
- Total investments
- 1
- Lead investments
- 1
- Investments · 12mo
- 0
- Active investors
- 5
Sector focus
- 3D Technology
- Manufacturing
- Semiconductor
Investment portfolio
- Multibeam
Led · Series B · Aug 2025
Multibeam builds production-grade multi-column electron-beam lithography (EBL) tools that offer a full-wafer field of view, exceptional depth of focus, maskless writing, and the ability to create unique patterns. The company shipped its first EBL production system last year and has seen increased interest from semiconductor manufacturers. Its platform is positioned to enable new chip designs for quantum computing, photonics, advanced packaging and other emerging applications. Multibeam plans to accelerate development of a next-generation EBL platform for 300mm wafers and panel-level maskless lithography. The company says these capabilities can support denser interconnects, lower energy consumption and higher performance for AI and related technologies. Strong partnerships with industry investors are expected to aid its next phase of growth.