Invisix develops soft X-ray metrology systems that use high harmonic generation (HHG) and broadband soft X-ray scatterometry combined with proprietary reconstruction algorithms and machine learning to non-destructively reconstruct 3D internal structures of advanced semiconductor devices. The company has licensed key technology from ASML and is staffed by ASML alumni and senior industry hires, including CEO Christina Porter and CTO Sietse van der Post. Invisix relocated a 300mm-wafer-capable soft X-ray testbench to a new cleanroom in Eindhoven and publicly demonstrated results in 2023 with Intel and imec. The company says its system is designed for high-throughput, high-volume manufacturing use and to resolve buried nanoscale structures that optical tools cannot see. With an oversubscribed €20M seed financing, Invisix plans to accelerate development of its first shippable product, expand its team, and run customer demonstrations in its new facility.

Total raised

$23M

Funding rounds

1

Latest round

Seed

Latest activity

Jun 2026