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MKS Instruments

2 Tech Drive, Andover, MA, 01810, United States

Overview

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.

Total investments
2
Lead investments
1
Investments · 12mo
0
Active investors
0

Sector focus

  • Enterprise Software
  • Information Technology
  • Manufacturing
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Investment portfolio

  • Reno Sub Systems

    Participated · Series C · Sep 2017

    Reno Sub-Systems develops technologies for the semiconductor and advanced microelectronic industries, including high-performance RF matching networks, RF power generators and gas delivery systems for nanoscale manufacturing processes. Led by CEO Bob MacKnight, the company supplies equipment and subsystems used in silicon manufacturing. It closed a Series C round to fund continued development and scaling of its technologies. The company intends to use the proceeds to enable silicon manufacturing technology nodes in high-volume production. The article does not disclose operating metrics or revenues. The focus is on advancing tools for nanoscale manufacturing and preparing those technologies for high-volume deployment. Reno Sub-Systems develops high-performance radio frequency (RF) matching networks, RF power generators and gas flow management systems for semiconductor manufacturing. Its enabling technologies aim to enable plasma processing to deep submicron feature sizes and short process times for both planar and 3D device architectures. The company also facilitates “always on” plasma management, fast gas transitions and low-flow management to reduce on-wafer particles, lower cost per transistor and improve film properties. Led by CEO Bob MacKnight, Reno Sub-Systems targets advanced microelectronic circuits and new process regimes. The company recently closed a $14M Series B financing. It plans to use the funds to win more platforms and move into high-volume manufacturing to cover demand. Reno Sub-Systems is a Bedford, Nova Scotia-based company that develops technologies for the semiconductor and advanced micro-electronic industries. Led by CEO David Ferran, the company designs, develops and delivers sub-systems used to control OEM process systems, including vacuum-based chambers for depositing and etching specialty materials in advanced IC fabrication. Its initial sub-system offerings provide RF-power generation and matching, process gas delivery and high-vacuum process control. The company intends to use proceeds from its recently closed venture funding round to bring its technologies to market. Reno maintains a U.S. headquarters in San Diego and technology development centers in New Jersey, California and Nevada. Backers in the round included Intel Capital, Innovacorp and other investors.

Team

No current team members are available.